Conference Venue

Important Dates

Plenary Speakers:

Keynote Speakers:


John Polanyi

University of Toronto, Canada

Watching Simple Molecules React at Surfaces, A-Molecule-At-A-Time

Scanning Tunneling Microscopy allows one to characterize the geometry of molecules at surfaces (their positioning, alignment and tilt) before and after they react. The motions of the atoms and radicals as they react can therefore be visualized in the form of movies, using a blend of quantum mechanics and classical mechanics to obtain the intermediate configurations. The atomic and molecular motions in reactions at semi- conductor and metal surfaces, obtained in this fashion, will be exemplified. Fortunately simple principles can be deduced governing the process of reaction, so that this visualization is more rewarding than would be the reconstruction of the script of Hamlet from its first and last acts. In fact, thanks to STM and the power of modern computing, our understanding of reaction dynamics at the nano-level is currently undergoing a renaissance.


John Polanyi, educated at Manchester University, England, was a postdoctoral fellow at Princeton University and at the National Research Council of Canada. He is a faculty member in the Department of Chemistry at the University of Toronto, a member of the Queen’s Privy Council for Canada (P.C.), and a Companion of the Order of Canada (C.C.). His awards include the 1986 Nobel Prize in Chemistry. He has written extensively on science policy, the control of armaments, peacekeeping and human rights.


Charles Lieber

Professor Charles M. Lieber
Mark Hyman Professor of Chemistry
Department of Chemistry and Chemical Biology
Harvard University

Nanowires, Nanoscience and Emerging Nanotechnologies

Nanoscience offers the promise of driving revolutionary advances in many areas of science and technology, ranging from electronics and computing to biology and medicine, yet the realization of this promise depends critically on the rational development of unique nanoscale structures whose properties and/or function are controlled during materials synthesis. What is the status today, and what are the prospects for the future of nanoscience and nanotechnology? This presentation will address these questions from the speaker’s perspective drawing from his work and that of the field broadly defined. First, bottom-up versus top-down paradigms of nanoscience will be introduced, as well the key concept of platform materials needed to drive the bottom-up approach. Second, a brief historical perspective on the emergence of nanowires will be discussed. The ‘chemical’ synthesis of complex modulated nanowires will be highlighted as a central material in nanoscience for enabling the bottom-up paradigm. Third, selected examples illustrating the interplay between nanoscience and emerging or future technologies will be highlighted. The concept of assembling a nanocomputer, first introduced by Feynman in 1959, will be introduced, and then the advances made in the past 10+ years will be reviewed and compared to parallel advances in industry. The potential for novel low-power processors for applications from micro-robots to implanted controller in the human body will be discussed. Next, the world-wide issue of energy will be addressed through an examination of past, present, and future efforts in nano-enabled renewable energy production and energy storage. Particular emphasis will be placed on efforts to exploit novel nanostructures for photovoltaic devices and novel paradigms enabled by the bottom-up approach. Last, advances and opportunities at the interface between nanotechnology and the life sciences will be discussed. Applications of inorganic and organic nanostructures as labels for imaging and drug delivery will be examined first. Then development of nanoelectronic devices with the capability to blur the distinction between electronic circuitry and cells to create ‘cyborg’ tissues will be described as an example of using nanoscience to realize what was once simply science fiction.


Charles M. Lieber is regarded as a leading chemist worldwide and recognized as a pioneer in the nanoscience and nanotechnology fields. He completed his doctoral studies at Stanford University and currently holds a joint appointment in the Department of Chemistry and Chemical Biology at Harvard University, as the Mark Hyman Professor of Chemistry, and the School of Engineering and Applied Sciences. Lieber is widely known for his contributions to the synthesis, understanding and assembly of nanoscale materials, as well as the founding of two nanotechnology companies: Nanosys and Vista Therapeutics.

Lieber's achievements have been recognized by a large number of awards, including the Feynman Prize for Nanotechnology (2002), World Technology award in Materials (2003 and 2004) and the Wolf Prize in Chemistry (2012). He has published more than 350 papers in peer-reviewed journals and is the primary inventor on over 35 patents.

Arthur Carty

Professor & Executive Director
University of Waterloo, Canada


Not Yet Available


Arthur Carty has a PhD in inorganic chemistry from the University of Nottingham in the UK. He is currently the Executive Director of the Waterloo Institute for Nanotechnology and research professor in the Department of Chemistry at the University of Waterloo.

Previously, Dr. Carty served in Canada as the National Science Advisor to the Prime Minister and President of the National Research Council (Canada). He was awarded the Order of Canada and holds 14 honorary doctorates.

His research interests are focused on organometallic chemistry and new materials.

William Milne

University of Cambridge, UK

SAW and FBAR Devices for Lab-on-a-chip Applications

W.I.Milne1, J.K.Luo2, Q. Fu3, L.Garcia – Gancedo, J.R.Lu4, X.B.Zhao4 and A.J.Flewitt

1. Engineering Dept, University of Cambridge
2. University of Bolton
3. University of West Scotland
4. University of Manchester

This presentation will describe the development of Biological Sensors based on Surface Acoustic Wave (SAW) and thin Film Bulk Acoustic Resonator Technologies. The SAW devices were fabricated using nanocrystalline ZnO thin films. In order to further improve the sensitivity of our SAW bio-sensors we have also investigated the use of Thin Film Bulk Acoustic Resonators (FBARs). I will describe gravimetric sensors based on such sensors, and end with a description of our most recent results on dual mode thin film FBARs for parallel sensing of both mass loading and temperature.


Bill Milne FREng,FIET,FIMMM has been Head of Electrical Engineering at Cambridge University since 1999 and Director of the Centre for Advanced Photonics and Electronics (CAPE) since 2005. In 1996 he was appointed to the ‘‘1944 Chair in Electrical Engineering’’. He obtained his BSc from St Andrews University in Scotland in 1970 and then went on to read for a PhD in Electronic Materials at Imperial College London. He was awarded his PhD and DIC in 1973 and, in 2003, a D.Eng (Honoris Causa) from University of Waterloo, Canada. He was elected a Fellow of The Royal Academy of Engineering in 2006. He was awarded the J.J. Thomson medal from the IET in 2008 and the NANOSMAT prize in 2010 for excellence in nanotechnology. His research interests include large area Si and carbon based electronics, graphene, carbon nanotubes and thin film materials. Most recently he has been investigating MEMS, SAW and FBAR devices and SOI based micro heaters for ( bio) sensing applications. He has published/presented ~ 800 papers in these areas, of which ~ 150 were invited. He co-founded Cambridge Nanoinstruments with 3 colleagues from the Department and this was bought out by Aixtron in 2008 and in 2009 co-founded Cambridge CMOS Sensors with Julian Gardner from Warwick Univ. and Florin Udrea from Cambridge Univ.

  Shuit-Tong Lee

Institute of Functional Nano & Soft Materials (FUNSOM)
Collaboration Innovation Center of Suzhou Nano Science and Technology
College of Nano Science and Technology (CNST)
Soochow University, China
Email: [email protected]

After a brief introduction of the nano materials and technology programs in Soochow University, I shall discuss our research activities in Si nanostructures. In recent years, we have developed various methods, such as vapor-liquid-solid (metal- or oxide-assisted growth, electrochemical etching, among others) for the rational synthesis of Si nanomaterials in various forms. Si nanostructures (nanowires, quantum dots) exhibit unique and remarkable structural, optical, electronic and chemical properties, which are exploited for myriad applications. Energy devices based on Si nanowire arrays can achieve efficiencies as high as 12% for solar energy conversion. Additionally, Si nanodots and nanowires can facilitate efficient photo-catalytic redox reactions of organics. I shall focus on our recent developments of Si nanostructures for environmental-green, high-efficiency, and low-cost solar energy conversion and catalysis applications.


Prof. Lee is the member (academician) of Chinese Academy of Sciences and the fellow of TWAS (the academy of sciences for the developing world). He is a distinguished scientist in material science and engineering. Prof. Lee is the Founding Director of Functional Nano & Soft Materials Laboratory (FUNSOM) and Director of the College of Chemistry, Chemical Engineering and Materials Science at Soochow University. He is also a Chair Professor of Materials Science and Founding Director of the Center of Super-Diamond and Advanced Films (COSDAF) at City University of Hong Kong and the Founding Director of Nano-Organic Photoelectronic Laboratory at the Technical Institute of Physics and Chemistry, CAS. He was the Senior Research Scientist and Project Manager at the Research Laboratories of Eastman Kodak Company in the US before he joined City University of Hong Kong in 1994. He won the Humboldt Senior Research Award (Germany) in 2001 and a Croucher Senior Research Fellowship from the Croucher Foundation (HK) in 2002 for the studies of “Nucleation and growth of diamond and new carbon based materials” and “Oxide assisted growth and applications of semiconducting nanowires”, respectively. He also won the National Natural Science Award of PRC (second class) in 2003 and 2005 for the above research achievements. Recently, he was awarded the 2008 Prize for Scientific and Technological Progress of Ho Leung Ho Lee Foundation. Prof. Lee’s research work has resulted in more than 650 peer-reviewed publications in prestigious chemistry, physics and materials science journals, 6 book chapters and over 20 US patents, among them 5 papers were published in Science and Nature (London) and some others were selected as cover papers. His papers have more than 10,000 citations by others, which is ranked within world top 25 in the materials science field according to ESI and ISI citation database.

Sergej Fatikow

Full Professor, Dr.-Ing. habil.
Head, Division for Microrobotics & Control Engineering (AMiR)
University of Oldenburg, Germany

Industrial Robotics and Automation for Applications at Nanoscale

Current research activities in AMiR include, amongst others, the development of new nano- handling robots; the investigation of novel automated nanohandling strategies; the develop- ment of advanced control methods; as well as the investigation of suitable real-time sensing technologies at nanoscale. In his talk, Prof. Fatikow introduces the new reasearch field of industrial robotics and automation for applications at nanoscale. He specially addresses his current work on an automated nanohandling robot cell inside a scanning electron microscope (SEM). The latter serves as a powerful vision sensor and the work space for nanohandling robots integrated into the vacuum chamber and equipped with application-specific tools. Major research issues of this work regarding the implementation of the main system components – the piezo-driven nanohandling robots, the robot control system, the sensor feedback – are discussed. Finally, current research projects and applications being pursued in AMiR are outlined. They include automated nanoassembly of AFM supertips inside SEM, handling and characterization of carbon nanotubes and graphene flakes, automated fabrication and exchange of nanorobot tools, automation issues in AFM-based nanohandling, and others.


Professor Sergej Fatikow studied electrical engineering and computer science at the Ufa Aviation Technical University in Russia, where he received his doctoral degree in 1988 with work on fuzzy control of complex non-linear systems. After that he worked until 1990 as a lecturer at the same university. During his work in Russia he published over 30 papers and successfully applied for over 50 patents in intelligent control and mechatronics. In 1990 he moved to the Institute for Process Control and Robotics at the University of Karlsruhe in Germany, where he worked as a postdoctoral scientific researcher and since 1994 as Head of the research group “Microrobotics and Micromechatronics”. He became an assistant professor in 1996 and qualified for a full faculty position by habilitation at the University of Karlsruhe in 1999. In 2000 he accepted a faculty position at the University of Kassel, Germany. A year later, he was invited to establish a new Division for Microrobotics and Control Engineering (AMiR) at the University of Oldenburg, Germany. Since 2001 he is a full professor in the Department of Computing Science and Head of AMiR. His research interests include micro- and nanorobotics, automated robot-based nanohandling in SEM, AFM-based nanohandling, sensor feedback at nanoscale, and neuro-fuzzy robot control. He is author of three books on microsystem technology, microrobotics and microassembly, robot-based nanohandling, and automation at nanoscale, published by Springer in 1997, Teubner in 2000, and Springer in 2008. Since 1990 he published over 100 book chapters and journal papers and over 200 conference papers. Prof. Fatikow is Founding Chair of the International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO) and Europe- Chair of IEEE-RAS Technical Committee on Micro/Nano Robotics and Automation.

Seiji Samukawa

Distinguished Professor
Innovative Energy Research Center, Institute of Fluid Science, Tohoku University
World Premier International Center Initiative, Advanced Institute for Materials Research, Tohoku University, Sendai, Japan

For the past 30 years, plasma process technology has been a key part of the efforts to shrink the pattern size of ultra-large-scale integrated (ULSI) devices. However, inherent problems in the plasma processes, such as charge buildup and UV photon radiation, limit the process (etching, deposition, surface modification) performance for nanoscale devices. To overcome these problems and fabricate sub-10-nm devices in practice, neutral beam technology has been proposed.

In this paper, I introduce the ultimate nanofabrication processes using neutral beam sources and discuss the fusion of top-down and bottom-up processing for future nanoscale devices. To achieve charge-free and UV photon irradiation damage-free processes, we have developed a new neutral beam generation system based on my discovery that neutral beams can be efficiently generated from the acceleration of negative ions produced in pulsed plasmas. Using neutral beam processing, we successfully demonstrated sub-50-nm damage-free gate electrode etching, damage-free Si channel etching for 45-nm finFETs, ultra-thin gate dielectric film formation for 32-nm finFETs, damage-free low dielectric film deposition for 22-nm FETs, and low-damage surface modification of carbon materials (including nanotubes, graphenes, and organic molecules) for future sub-10 nm nanodevices. More recently, we have investigated processing technologies based on a combination of biotechnology and neutral-beam-based nanoprocesses, i.e., bio-nanoprocesses, for future nanoelectronic devices and successfully achieved the fabrication of sub-10-nm-diameter and high density Si, Ge, GaAs, InGaAs, and graphene nanodisk (nanodot) array structures. The quantum effects of these nanoscaled structures were shown to manifest themselves at room temperature due to the damage- free surfaces made possible by the neutral beam processes. Now, by using these nanodisk structures, we are actively developing “novel quantum effect devices”, such as a quantum dot solar cell for a high energy conversion efficiency of more than 45% and a quantum dot optical devices.

We are actively developing ultra-low-damage nanofabrication techniques using neutral beam technology that taps into the essential nature of nanomaterials and nanostructures and are actively developing innovative nanodevices.


Dr. Seiji Samukawa received a BSc in 1981 from the Faculty of Technology of Keio University and joined NEC Corporation the same year. At NEC Microelectronics Research Laboratories, he was the lead researcher of a group performing fundamental research on advanced plasma etching processes for technology under 0.1 μm. While there, he received the Ishiguro Award—given by NEC’s R&D; Group and Semiconductor Business Group— for his work in applying a damage-free plasma etching process to a mass-production line. After spending several years in the business world, however, he returned to Keio University, obtaining a PhD in engineering in 1992. Since 2000, he has served as professor at the Institute of Fluid Science at Tohoku University and developed ultra-low-damage microfabrication techniques that tap into the essential nature of nanomaterials and developed innovative nanodevices. He is also carrying out pioneering, creative research on bio-template technologies, which are based on a completely new concept of treating the super-molecules of living organisms. His motto when conducting research is to “always aim toward eventual practical realization.”

In recognition of his excellent achievements outlined above, he has been elected as a Distinguished Professor of Tohoku University and has been a Fellow of the Japan Society of Applied Physics since 2008 and a Fellow of the American Vacuum Society since 2009. His significant scientific achievements earned him the Outstanding Paper Award at the International Conference on Micro and Nanotechnology (1997), Best Review Paper Award (2001), Japanese Journal of Applied Physics (JJAP) Editorial Contribution Award (2003), Plasma Electronics Award (2004), Fellow Award (2008), JJAP Paper Award (2008) from the Japan Society of Applied Physics, Distinguished Graduate Award (2005) from Keio University, Ichimura Award (2008) from the New Technology Development Foundation, Commendation for Science and Technology from the Minister of Education, Culture, Sports, Science and Technology (2009), Fellow Award of American Vacuum Society (2009), Plasma Electronics Award from the Japan Society of Applied Physics (2010), Best Paper Award from the Japan Society of Applied Physics (2010), and Plasma Prize from the Plasma Science and Technology Division of American Vacuum Society (2010).


Haixia (Alice) Zhang

Institute of Microelectronics
Peking University, China

High Performance Triboelectric Nanogenerator for Self- Powering Smart System

As is well known, energy crisis are becoming a worldwide problem and researchers are making every effort to search for the green and renewable energy source. To solve the problem, self-powered system has been proposed, which focuses on harvesting energy from the ambient environment. In 2012, utilizing the friction to generate energy based on the combination of triboelectric and electrostatic effect is presented as triboelectric nanogenerators (TENGs) which can be applied to biomedical and environmental systems as a power supply or a self-powered active sensor. In this talk, speaker will talk about their research work in TENGs. First, a Sandwich TENGs with energy volume density achieved 465 V, 13.4 µA/cm2 , and 53.4 mW/cm3, which can drive an implantable 3-D microelectrode array for neural prosthesis without any energy storage unit or rectification circuit. Second, the r-shape hybrid piezoelectric NG and TENG is integrated into a keyboard to harvest energy in the typing process. Third, a single-friction-surface triboelectric generator (STEG) is transparent and flexible, which is applied for powering smart systems, such as touch panels, cell phone, artificial skins, sensor network nodes and so on.


Haixia(Alice) Zhang, Professor, Institute of Microelectronics, Peking Universituy. She was served on the general chair of IEEE NEMS 2013 Conference, the organizing chair of Transducers’11. As the founder of the International Contest of Applications in Network of things (iCAN), she organized this world-wide event since 2007. She was elected the director of Integrated Micro/Nano System Engineering Center in 2006, the deputy secretary-general of Chinese Society of Micro-Nano Technology in 2005, the Co-chair of Chinese International NEMS Network (CINN) and serves as the chair of IEEE NTC Beijing Chapter. At 2006, Dr. Zhang won National Invention Award of Science & Technology. Her research fields include MEMS Design and Fabrication Technology, SiC MEMS and Micro Energy Technology.

Alice’s Wonderlab: